Surrey NanoSystems produces the world's most advanced tools and Carbon Nanotube processing recipes - making precision, repeatable nanotube and nanowire fabrication a reality. Surrey NanoSystems: focused on providing production platforms in high technology applications, including the replacement of conventional metals used in the fabrication of silicon chips - which are approaching their performance limits. We will configure and build the turnkey process equipment you need to support your nanoengineering and thin film programs.
We have a portfolio of tools including Carbon Nanotube growth tools, and the established line of thin film sputtering tools - the Gamma range. The extremely high degree of processing flexibility in Gamma is favoured wherever users faces novel deposition or material growth applications, the Gamma tool has a track record of success with renowned R&D and industrial establishments. We have developed a modular hardware platform, control software, and processing recipes that make low temperature Carbon Nanotube growth (as well as conventional high temperature growth) feasible:
The NanoGrowth™, a versatile PVD/PECVD processing tool. The NanoGrowth™ system, contains world-leading IP developed at The University of Surrey's Advanced Technology Institute (ATI), it provides a versatile and proven platform for nanoengineering research, development and production. It pioneers techniques for the precision growth of Carbon Nanotubes at temperatures compatible with CMOS semiconductor fabrication processes.
